To establish a quality management system (QMS) for cleanroom wafer processes
This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) w...
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Format: | Theses and Dissertations |
Language: | English |
Published: |
2008
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Online Access: | http://hdl.handle.net/10356/13508 |
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Institution: | Nanyang Technological University |
Language: | English |