To establish a quality management system (QMS) for cleanroom wafer processes
This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) w...
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| Online Access: | http://hdl.handle.net/10356/13508 |
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sg-ntu-dr.10356-135082023-03-11T16:57:47Z To establish a quality management system (QMS) for cleanroom wafer processes Mok, Hiang Teck. Spedding, Trevor Allan School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Clean room DRNTU::Engineering::Manufacturing::Quality control This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) which is a Research and Development (R&D) institute under the Economic Development Board (EDB) of Singapore. Master of Science (Precision Engineering) 2008-10-20T08:21:52Z 2008-10-20T08:21:52Z 1998 1998 Thesis http://hdl.handle.net/10356/13508 en 164 p. application/pdf |
| institution |
Nanyang Technological University |
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NTU Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
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English |
| topic |
DRNTU::Engineering::Manufacturing::Clean room DRNTU::Engineering::Manufacturing::Quality control |
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DRNTU::Engineering::Manufacturing::Clean room DRNTU::Engineering::Manufacturing::Quality control Mok, Hiang Teck. To establish a quality management system (QMS) for cleanroom wafer processes |
| description |
This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) which is a Research and Development (R&D) institute under the Economic Development Board (EDB) of Singapore. |
| author2 |
Spedding, Trevor Allan |
| author_facet |
Spedding, Trevor Allan Mok, Hiang Teck. |
| format |
Theses and Dissertations |
| author |
Mok, Hiang Teck. |
| author_sort |
Mok, Hiang Teck. |
| title |
To establish a quality management system (QMS) for cleanroom wafer processes |
| title_short |
To establish a quality management system (QMS) for cleanroom wafer processes |
| title_full |
To establish a quality management system (QMS) for cleanroom wafer processes |
| title_fullStr |
To establish a quality management system (QMS) for cleanroom wafer processes |
| title_full_unstemmed |
To establish a quality management system (QMS) for cleanroom wafer processes |
| title_sort |
to establish a quality management system (qms) for cleanroom wafer processes |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/13508 |
| _version_ |
1761781749054963712 |