To establish a quality management system (QMS) for cleanroom wafer processes

• Main Author: Mok, Hiang Teck.
• Other Authors: Spedding, Trevor Allan
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Clean room; DRNTU::Engineering::Manufacturing::Quality control
• Online Access: http://hdl.handle.net/10356/13508
• Institution: Nanyang Technological University

This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) w...