Transient processes analysis for single-arm cluster tools with different structures

Numerous studies of cluster tool operations in steady state have been published in the field of wafer manufacturing. However, as wafer batch sizes decrease, more transient processes are generated such that tools should switch from processing one wafer to another wafer and the transient processes sho...

Full description

Saved in:
Bibliographic Details
Main Author: Dai, Xinyi
Other Authors: Su Rong
Format: Thesis-Master by Coursework
Language:English
Published: Nanyang Technological University 2020
Subjects:
Online Access:https://hdl.handle.net/10356/141312
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
Be the first to leave a comment!
You must be logged in first