Transient processes analysis for single-arm cluster tools with different structures

• Main Author: Dai, Xinyi
• Other Authors: Su Rong
• Format: Thesis-Master by Coursework
• Language: English
• Published: Nanyang Technological University 2020
• Subjects: Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• Online Access: https://hdl.handle.net/10356/141312
• Institution: Nanyang Technological University

Numerous studies of cluster tool operations in steady state have been published in the field of wafer manufacturing. However, as wafer batch sizes decrease, more transient processes are generated such that tools should switch from processing one wafer to another wafer and the transient processes sho...