Optomems device development for DWDM system applications

• Main Author: Liu, Ai Qun.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems; DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/14228
• Institution: Nanyang Technological University

The rapid development of microelectromechanical systems (MEMS) technology has paved the way for engineering innovations and physical discoveries of optical devices. In this project, new optical MEMS devices that could play key roles in the dense wavelength division multiplexing (DWDM) systems have been developed, including optical switches and tunable lasers. First, a novel micromachined actuator and a deep reactive ion etching (DRIE) process have been investigated.