Material characterizations of high refractive films for active waveguide

• Main Author: Kantisara Pita.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
• Online Access: http://hdl.handle.net/10356/14234
• Institution: Nanyang Technological University

The fabrication of SiON and Erbium (Er) doped SiON films have been successfully developed using the sputtering and co-sputtering techniques. The properties of the films such as the optical properties, the compositions, the chemical bonds and the microstructures, have been well characterized and s...