Material characterizations of high refractive films for active waveguide

• 主要作者: Kantisara Pita.
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Research Report
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
• 在線閱讀: http://hdl.handle.net/10356/14234

The fabrication of SiON and Erbium (Er) doped SiON films have been successfully developed using the sputtering and co-sputtering techniques. The properties of the films such as the optical properties, the compositions, the chemical bonds and the microstructures, have been well characterized and s...