Development of a CMOs-compatible carbon nanotube array transfer method

Development of a CMOs-compatible carbon nanotube array transfer method

Carbon nanotubes (CNTs) have, over the years, been used in research as a promising material in electronics as a thermal interface material and as interconnects amongst other applications. However, there exist several issues preventing the widespread integration of CNTs onto device applications, e.g....

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Bibliographic Details
Main Authors: Siah, Chun Fei, Lum, Lucas Yu Xiang, Wang, Jianxiong, Goh, Simon Chun Kiat, Tan, Chong Wei, Hu, Liangxing, Coquet, Philippe, Li, Hong, Tan, Chuan Seng, Tay, Beng Kang
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2021
Subjects:
Engineering
Carbon Nanotubes
Microelectronics Fabrication
Online Access:https://hdl.handle.net/10356/146291
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Institution: Nanyang Technological University
Language: English
Description
Summary:Carbon nanotubes (CNTs) have, over the years, been used in research as a promising material in electronics as a thermal interface material and as interconnects amongst other applications. However, there exist several issues preventing the widespread integration of CNTs onto device applications, e.g., high growth temperature and interfacial resistance. To overcome these issues, a complementary metal oxide semiconductor (CMOS)-compatible CNT array transfer method that electrically connects the CNT arrays to target device substrates was developed. The method separates the CNT growth and preparation steps from the target substrate. Utilizing an alignment tool with the capabilities of thermocompression enables a highly accurate transfer of CNT arrays onto designated areas with desired patterns. With this transfer process as a starting point, improvement pointers are also discussed in this paper to further improve the quality of the transferred CNTs.

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