Atomic layer deposition of Pd and Pt thin films with ozone

• Main Author: Aw, Jin Yan
• Other Authors: Alfred Tok Iing Yoong
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2021
• Subjects: Engineering::Materials
• Online Access: https://hdl.handle.net/10356/147662
• Institution: Nanyang Technological University

There has been a rising trend in miniaturisation of devices, which leads to an increase in demand for thin and ultrathin films. There are several techniques to deposit thin films, one of which is Atomic Layer Deposition (ALD), which has been growing in popularity in recent times. ALD can deposit thi...