Microstructure and through-film electrical characteristics of vertically aligned amorphous carbon films

• Main Authors: Tan, Chong Wei, Shakerzadeh, Maziar, Teo, Edwin Hang Tong, Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering; Amorphous Carbon; Graphite
• Online Access: https://hdl.handle.net/10356/151193
• Institution: Nanyang Technological University

The microstructure and electrical properties of in-situ annealed carbon films is studied in this paper. In-situ annealing (150 °C to 600 °C) was done during the deposition of carbon films with −300 V substrate bias. Transmission electron microscopy and two points electrical probing studies were perf...