Suspended germanium membranes photodetector with tunable biaxial tensile strain and location-determined wavelength-selective photoresponsivity

• Main Authors: Wu, Shaoteng, Zhou, Hao, Chen, Qimiao, Zhang, Lin, Lee, Kwang Hong, Bao, Shuyu, Fan, Weijun, Tan, Chuan Seng
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering::Semiconductors; Germanium; Photodetector
• Online Access: https://hdl.handle.net/10356/153161
• Institution: Nanyang Technological University

A divergent microstructure was fabricated by CMOS compatible processes on the central region of a Ge p i-n photodetector to enhance the residual tensile strain. Tunable biaxial tensile strain of ~0.22-1.01% was achieved by varying the geometrical factors, and it was confirmed by Raman measurements a...