Fabrication of 1D and 2D gratings by interference lithography

• Main Author: Chua, Xin Rong.
• Other Authors: Wong Chee Cheong
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/15337
• Institution: Nanyang Technological University

Interference lithography (IL) is a simple method for fabricating periodic and quasi-periodic nanostructures that are spatially coherent over large areas for plasmonic/ photonic and biosensing applications. In this work, fabrication of one-dimensional (1D) and two-dimensional (2D) periodic arrays is...