Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications

• Main Author: Wu, Xiaoying.
• Other Authors: Dong Zhili
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: http://hdl.handle.net/10356/15380
• Institution: Nanyang Technological University

SrY4(SiO4)3O single crystals with the oxyapatite structure were grown by the solgel method. This method is straightforward, inexpensive, versatile and it produces pure powders with controlled sized and morphology. The dependence of the nature of the phases was studied by varying several parameter...