Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications
SrY4(SiO4)3O single crystals with the oxyapatite structure were grown by the solgel method. This method is straightforward, inexpensive, versatile and it produces pure powders with controlled sized and morphology. The dependence of the nature of the phases was studied by varying several parameter...
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sg-ntu-dr.10356-153802023-03-04T15:41:31Z Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications Wu, Xiaoying. Dong Zhili School of Materials Science and Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials SrY4(SiO4)3O single crystals with the oxyapatite structure were grown by the solgel method. This method is straightforward, inexpensive, versatile and it produces pure powders with controlled sized and morphology. The dependence of the nature of the phases was studied by varying several parameters such as the volumetric ratio of the acetic acid catalyst to TEOS and the calcination temperature. These two parameters affect the crystal structures and the purity of the oxides obtained after heat treatment in air. Bachelor of Engineering (Materials Engineering) 2009-04-28T02:28:41Z 2009-04-28T02:28:41Z 2009 2009 Final Year Project (FYP) http://hdl.handle.net/10356/15380 en 38 p. application/pdf |
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Singapore Singapore |
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DRNTU::Engineering::Materials::Microelectronics and semiconductor materials |
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DRNTU::Engineering::Materials::Microelectronics and semiconductor materials Wu, Xiaoying. Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| description |
SrY4(SiO4)3O single crystals with the oxyapatite structure were grown by the solgel
method. This method is straightforward, inexpensive, versatile and it
produces pure powders with controlled sized and morphology. The dependence
of the nature of the phases was studied by varying several parameters such as
the volumetric ratio of the acetic acid catalyst to TEOS and the calcination
temperature. These two parameters affect the crystal structures and the purity of
the oxides obtained after heat treatment in air. |
| author2 |
Dong Zhili |
| author_facet |
Dong Zhili Wu, Xiaoying. |
| format |
Final Year Project |
| author |
Wu, Xiaoying. |
| author_sort |
Wu, Xiaoying. |
| title |
Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| title_short |
Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| title_full |
Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| title_fullStr |
Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| title_full_unstemmed |
Solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| title_sort |
solid state synthesis of nanoporous insulating refractory oxides for microelectronic applications |
| publishDate |
2009 |
| url |
http://hdl.handle.net/10356/15380 |
| _version_ |
1759854843639365632 |