Hierarchical aggregation/disaggregation for adaptive abstraction-level conversion in digital twin-based smart semiconductor manufacturing

Hierarchical aggregation/disaggregation for adaptive abstraction-level conversion in digital twin-based smart semiconductor manufacturing

In smart manufacturing, engineers typically analyze unexpected real-time problems using digitally cloned discrete-event (DE) models for wafer fabrication. To achieve a faster response to problems, it is essential to increase the speed of DE simulations because making optimal decisions for addressing...

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Bibliographic Details
Main Authors: Seok, Moon Gi, Cai, Wentong, Park, Daejin
Other Authors: School of Computer Science and Engineering
Format: Article
Language:English
Published: 2022
Subjects:
Engineering::Computer science and engineering
Abstraction-Level Conversion
Aggregation/Disaggregation
Online Access:https://hdl.handle.net/10356/154073
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Institution: Nanyang Technological University
Language: English

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https://hdl.handle.net/10356/154073

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