Hierarchical aggregation/disaggregation for adaptive abstraction-level conversion in digital twin-based smart semiconductor manufacturing

• Main Authors: Seok, Moon Gi, Cai, Wentong, Park, Daejin
• Other Authors: School of Computer Science and Engineering
• Format: Article
• Language: English
• Published: 2022
• Subjects: Engineering::Computer science and engineering; Abstraction-Level Conversion; Aggregation/Disaggregation
• Online Access: https://hdl.handle.net/10356/154073
• Institution: Nanyang Technological University

In smart manufacturing, engineers typically analyze unexpected real-time problems using digitally cloned discrete-event (DE) models for wafer fabrication. To achieve a faster response to problems, it is essential to increase the speed of DE simulations because making optimal decisions for addressing...