Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects

• Main Authors: Rendón-Barraza, Carolina, Chan, Eng Aik, Yuan, Guanghui, Adamo, Giorgio, Pu, Tanchao, Zheludev, Nikolay, I.
• Other Authors: School of Physical and Mathematical Sciences
• Format: Article
• Language: English
• Published: 2022
• Subjects: Science::Physics; Deep Learning; Optical Metrology
• Online Access: https://hdl.handle.net/10356/154947
• Institution: Nanyang Technological University

Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelength of light λ. Metrology of sub-wavelength objects, however, was deemed impossible due to the diffraction limit. We report the measurement of the phy...