Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects
Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelength of light λ. Metrology of sub-wavelength objects, however, was deemed impossible due to the diffraction limit. We report the measurement of the phy...
Saved in:
Main Authors: | Rendón-Barraza, Carolina, Chan, Eng Aik, Yuan, Guanghui, Adamo, Giorgio, Pu, Tanchao, Zheludev, Nikolay, I. |
---|---|
Other Authors: | School of Physical and Mathematical Sciences |
Format: | Article |
Language: | English |
Published: |
2022
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/154947 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
Similar Items
-
2D super-resolution metrology based on superoscillatory light
by: Wang, Yu, et al.
Published: (2024) -
Planar super-oscillatory lens for sub-diffraction optical needles at violet wavelengths
by: Yuan, Guanghui, et al.
Published: (2015) -
Sub-wavelength focusing meta-lens
by: Roy, Tapashree, et al.
Published: (2013) -
Achromatic super-oscillatory lenses with sub-wavelength focusing
by: Yuan, Guang Hui, et al.
Published: (2017) -
Label-free deeply subwavelength optical microscopy
by: Pu, T., et al.
Published: (2020)