Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavele...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2012
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| Online Access: | https://hdl.handle.net/10356/50922 |
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| Institution: | Nanyang Technological University |
| Language: | English |