Investigation into interferometric sub-wavelength periodic feature fabrication and their applications

Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavele...

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Main Author: Sidharthan Raghuraman
Other Authors: Franck Alexis Chollet
Format: Theses and Dissertations
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/50922
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-509222023-03-11T17:57:45Z Investigation into interferometric sub-wavelength periodic feature fabrication and their applications Sidharthan Raghuraman Franck Alexis Chollet Murukeshan Vadakke Matham School of Mechanical and Aerospace Engineering MicroMachines Centre DRNTU::Science::Physics::Optics and light DRNTU::Engineering::Nanotechnology Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavelength periodic features. Further a multifaceted prism based zero path interferometer, for large area sub-micron patterning and immersion based interferometer for high resolution nano-scale patterning, is proposed and validated. Fabrication of complex features by interference lithography is one of the thrust research areas that were not fully researched. In this context, effect of the polarization states of individual beams in a multiple beam interference lithography was analyzed which led to the realization of a range of structures in 1D and 2D patterning. It is also found that body centered tetragonal, woodpile, β-tin type and diamond like structures can be obtained using multiple beam interference. Sub-wavelength periodic features are found to be very useful in various areas of nano photonics. Enhancing SPP propagation is explored using a periodic mask based near field lithography and with dye based gain medium. As one of the potential future applications, improving light absorption in thin film solar cell was also explored using the developed structures and proposed concepts. DOCTOR OF PHILOSOPHY (MAE) 2012-12-21T05:59:02Z 2012-12-21T05:59:02Z 2012 2012 Thesis Sidharthan, R. (2012). Investigation into interferometric sub-wavelength periodic feature fabrication and their applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/50922 10.32657/10356/50922 en 230 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Science::Physics::Optics and light
DRNTU::Engineering::Nanotechnology
spellingShingle DRNTU::Science::Physics::Optics and light
DRNTU::Engineering::Nanotechnology
Sidharthan Raghuraman
Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
description Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavelength periodic features. Further a multifaceted prism based zero path interferometer, for large area sub-micron patterning and immersion based interferometer for high resolution nano-scale patterning, is proposed and validated. Fabrication of complex features by interference lithography is one of the thrust research areas that were not fully researched. In this context, effect of the polarization states of individual beams in a multiple beam interference lithography was analyzed which led to the realization of a range of structures in 1D and 2D patterning. It is also found that body centered tetragonal, woodpile, β-tin type and diamond like structures can be obtained using multiple beam interference. Sub-wavelength periodic features are found to be very useful in various areas of nano photonics. Enhancing SPP propagation is explored using a periodic mask based near field lithography and with dye based gain medium. As one of the potential future applications, improving light absorption in thin film solar cell was also explored using the developed structures and proposed concepts.
author2 Franck Alexis Chollet
author_facet Franck Alexis Chollet
Sidharthan Raghuraman
format Theses and Dissertations
author Sidharthan Raghuraman
author_sort Sidharthan Raghuraman
title Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
title_short Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
title_full Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
title_fullStr Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
title_full_unstemmed Investigation into interferometric sub-wavelength periodic feature fabrication and their applications
title_sort investigation into interferometric sub-wavelength periodic feature fabrication and their applications
publishDate 2012
url https://hdl.handle.net/10356/50922
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