Investigation into interferometric sub-wavelength periodic feature fabrication and their applications

Fabrication of sub-wavelength periodic structures requires advanced lithographic techniques so as to achieve uniform, large area patterns. Novel interference lithographic concepts/methodologies are proposed theoretically followed by experimental validation to fabricate uniform large area sub-wavele...

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Bibliographic Details
Main Author: Sidharthan Raghuraman
Other Authors: Franck Alexis Chollet
Format: Theses and Dissertations
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/50922
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Institution: Nanyang Technological University
Language: English

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