Atomic layer deposition of metallic tri-layer for alloy formation

• Main Author: Yong, Sidney Kwong Roong
• Other Authors: Alfred Tok Iing Yoong
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2022
• Subjects: Engineering::Materials
• Online Access: https://hdl.handle.net/10356/156175
• Institution: Nanyang Technological University

Research has brought about great interest in the field of thin films and its applications. With the need for increasingly smaller devices, there is an increasing demand for synthesis methods to control and precisely fabricate components and materials. Atomic layer deposition (ALD) has become a topic...