Direct chemisorption-assisted nanotransfer printing with wafer-scale uniformity and controllability

• Main Authors: Zhao, Zhi-Jun, Shin, Sang-Ho, Lee, Sang Yeon, Son, Bongkwon, Liao, Yikai, Hwang, Soonhyoung, Jeon, Sohee, Kang, Hyeokjoong, Kim, Munho, Jeong, Jun-Ho
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2022
• Subjects: Engineering::Electrical and electronic engineering::Semiconductors; Nanotransfer Printing; Metal-Assisted Chemical Etching
• Online Access: https://hdl.handle.net/10356/156826
• Institution: Nanyang Technological University

Nanotransfer printing techniques have attracted significant attention due to their outstanding simplicity, cost-effectiveness, and high throughput. However, conventional methods via a chemical medium hamper the efficient fabrication with large-area uniformity and rapid development of electronic and...