A heavily doped germanium pyramid array for tunable optical antireflection in the broadband mid-infrared range
In this work, we report the heavily doped germanium (Ge) inverted pyramid array as a suitable candidate for tunable antireflection in mid-infrared (MIR) range. Inverted Ge pyramid structures are formed by the metal-assisted chemical etching process. The heavy doping profile in a box shape is obtaine...
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Main Authors: | , , , , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2022
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/156827 |
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Institution: | Nanyang Technological University |
Language: | English |