A heavily doped germanium pyramid array for tunable optical antireflection in the broadband mid-infrared range

In this work, we report the heavily doped germanium (Ge) inverted pyramid array as a suitable candidate for tunable antireflection in mid-infrared (MIR) range. Inverted Ge pyramid structures are formed by the metal-assisted chemical etching process. The heavy doping profile in a box shape is obtaine...

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Bibliographic Details
Main Authors: Son, Bongkwon, Shin, Sang-Ho, Jin, Yuhao, Liao, Yikai, Zhao, Zhi-Jun, Jeong, Jun-Ho, Wang, Qi Jie, Wang, Xincai, Tan, Chuan Seng, Kim, Munho
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2022
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Online Access:https://hdl.handle.net/10356/156827
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Institution: Nanyang Technological University
Language: English