Nanolithography for neuromorphic computing

The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of de...

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Main Author: Soh, Wei Liang
Other Authors: S.N. Piramanayagam
Format: Final Year Project
Language:English
Published: Nanyang Technological University 2022
Subjects:
Online Access:https://hdl.handle.net/10356/156901
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1569012023-02-28T23:14:42Z Nanolithography for neuromorphic computing Soh, Wei Liang S.N. Piramanayagam School of Physical and Mathematical Sciences prem@ntu.edu.sg Science::Physics::Atomic physics::Solid state physics The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of devices, and any possible improvements to these components for better results. Bachelor of Science in Applied Physics 2022-04-27T06:29:31Z 2022-04-27T06:29:31Z 2022 Final Year Project (FYP) Soh, W. L. (2022). Nanolithography for neuromorphic computing. Final Year Project (FYP), Nanyang Technological University, Singapore. https://hdl.handle.net/10356/156901 https://hdl.handle.net/10356/156901 en application/pdf Nanyang Technological University
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Science::Physics::Atomic physics::Solid state physics
spellingShingle Science::Physics::Atomic physics::Solid state physics
Soh, Wei Liang
Nanolithography for neuromorphic computing
description The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of devices, and any possible improvements to these components for better results.
author2 S.N. Piramanayagam
author_facet S.N. Piramanayagam
Soh, Wei Liang
format Final Year Project
author Soh, Wei Liang
author_sort Soh, Wei Liang
title Nanolithography for neuromorphic computing
title_short Nanolithography for neuromorphic computing
title_full Nanolithography for neuromorphic computing
title_fullStr Nanolithography for neuromorphic computing
title_full_unstemmed Nanolithography for neuromorphic computing
title_sort nanolithography for neuromorphic computing
publisher Nanyang Technological University
publishDate 2022
url https://hdl.handle.net/10356/156901
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