Nanolithography for neuromorphic computing

• Main Author: Soh, Wei Liang
• Other Authors: S.N. Piramanayagam
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2022
• Subjects: Science::Physics::Atomic physics::Solid state physics
• Online Access: https://hdl.handle.net/10356/156901
• Institution: Nanyang Technological University

The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of de...