Nanolithography for neuromorphic computing
The report describes the fabrication of devices on a microscopic and nanoscopic scale through the use of the NanoFrazor machine, a thermal scanning probe lithography tool. It details the three components (namely, the etch stack, machine instructions and post-pattern procedures) for fabrication of de...
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| Format: | Final Year Project |
| Language: | English |
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Nanyang Technological University
2022
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| Online Access: | https://hdl.handle.net/10356/156901 |
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| Institution: | Nanyang Technological University |
| Language: | English |