Reactive sputtering of CoZrTaOx thin films

• Main Author: Zheng, Cheng
• Other Authors: Gan Chee Lip
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2022
• Subjects: Engineering::Materials
• Online Access: https://hdl.handle.net/10356/159239
• Institution: Nanyang Technological University

As a novel metal oxide material with promising electrical properties, CoZrTaOx (OCZT) requires precise control of conditons in the reactive sputtering process to ensure that deposited thin films demonstrate stable and favorable qualities. As the properties of OCZT thin films to process conditions is...