Optical profilometer at nanometer scales for semiconductor chip

• المؤلف الرئيسي: Wei, Haoran
• مؤلفون آخرون: Cuong Dang
• التنسيق: Thesis-Master by Coursework
• اللغة: English
• منشور في: Nanyang Technological University 2022
• الموضوعات: Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/159268
• المؤسسة: Nanyang Technological University

With the development of the semiconductor industry, the feature size of semiconductor chips has been gradually reduced and has reached the nanometer level. Whether it is scientific research or actual production, it is necessary for the detection of such small-sized structural contours. The conventio...