Optical profilometer at nanometer scales for semiconductor chip
With the development of the semiconductor industry, the feature size of semiconductor chips has been gradually reduced and has reached the nanometer level. Whether it is scientific research or actual production, it is necessary for the detection of such small-sized structural contours. The conventio...
Saved in:
Main Author: | Wei, Haoran |
---|---|
Other Authors: | Cuong Dang |
Format: | Thesis-Master by Coursework |
Language: | English |
Published: |
Nanyang Technological University
2022
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/159268 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
Similar Items
-
Optical nonlinearities of semiconductors and nonlinear optical crystals
by: Li, He Ping.
Published: (2008) -
Optical system for camera flip chip application
by: Ng, Keh Chyun.
Published: (2008) -
Optical characterization of semiconductor quantum wells
by: Luo, Chang Ping.
Published: (2009) -
Semiconductor quantum well photodetector for fibre optical communication application
by: Li, Dao Sheng
Published: (2011) -
Research and development on integrated optical devices based on non-semiconductor materials
by: Kam, Chan Hin, et al.
Published: (2008)