Far-field and near-field photon emission microscopy for semiconductor devices

• المؤلف الرئيسي: Ding, Yuzhou
• مؤلفون آخرون: Poenar Daniel Puiu
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/49629
• المؤسسة: Nanyang Technological University

Optical information is the primary channel for human being to understand the physical world. In electronics industry, photon emission microscopy (PEM) is an established tool used in defect isolation. The correlation between the light emission and local currents discussed in literature shows the poss...