Far-field and near-field photon emission microscopy for semiconductor devices

• Main Author: Ding, Yuzhou
• Other Authors: Poenar Daniel Puiu
• Format: Final Year Project
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/49629
• Institution: Nanyang Technological University

Optical information is the primary channel for human being to understand the physical world. In electronics industry, photon emission microscopy (PEM) is an established tool used in defect isolation. The correlation between the light emission and local currents discussed in literature shows the poss...