Optical profilometer at nanometer scales for semiconductor chip
With the development of the semiconductor industry, the feature size of semiconductor chips has been gradually reduced and has reached the nanometer level. Whether it is scientific research or actual production, it is necessary for the detection of such small-sized structural contours. The conventio...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2022
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| Online Access: | https://hdl.handle.net/10356/159268 |
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| Institution: | Nanyang Technological University |
| Language: | English |