Advanced phase shifting algorithms: development and evaluation

• المؤلف الرئيسي: Chen, Yuchi
• مؤلفون آخرون: Qian Kemao
• التنسيق: Thesis-Doctor of Philosophy
• اللغة: English
• منشور في: Nanyang Technological University 2022
• الموضوعات: Engineering::Computer science and engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/159437
• المؤسسة: Nanyang Technological University

Phase extraction is extremely important in optical metrology, for which, many phase-shifting algorithms who are either with known phase shifts and based on simple triangular identities (abbreviated as kPSA) or with unknown phase shifts and based on advanced techniques (abbreviated as uPSA) have been...