Advanced phase shifting algorithms: development and evaluation
Phase extraction is extremely important in optical metrology, for which, many phase-shifting algorithms who are either with known phase shifts and based on simple triangular identities (abbreviated as kPSA) or with unknown phase shifts and based on advanced techniques (abbreviated as uPSA) have been...
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| Format: | Thesis-Doctor of Philosophy |
| Language: | English |
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Nanyang Technological University
2022
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| Online Access: | https://hdl.handle.net/10356/159437 |
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| Institution: | Nanyang Technological University |
| Language: | English |
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