Advanced phase shifting algorithms: development and evaluation

Phase extraction is extremely important in optical metrology, for which, many phase-shifting algorithms who are either with known phase shifts and based on simple triangular identities (abbreviated as kPSA) or with unknown phase shifts and based on advanced techniques (abbreviated as uPSA) have been...

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Bibliographic Details
Main Author: Chen, Yuchi
Other Authors: Qian Kemao
Format: Thesis-Doctor of Philosophy
Language:English
Published: Nanyang Technological University 2022
Subjects:
Online Access:https://hdl.handle.net/10356/159437
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Institution: Nanyang Technological University
Language: English

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