Van der Waals integration of high-κ perovskite oxides and two-dimensional semiconductors

• Main Authors: Yang, Allen Jian, Han, Kun, Huang, Ke, Ye, Chen, Wen, Wen, Zhu, Ruixue, Zhu, Rui, Xu, Jun, Yu, Ting, Gao, Peng, Xiong, Qihua, Wang, Renshaw Xiao
• Other Authors: School of Physical and Mathematical Sciences
• Format: Article
• Language: English
• Published: 2022
• Subjects: Science::Physics; Engineering::Electrical and electronic engineering; Layered Semiconductors; Molybdenum Compounds
• Online Access: https://hdl.handle.net/10356/162422
• Institution: Nanyang Technological University

Two-dimensional semiconductors can be used to build next-generation electronic devices with ultrascaled channel lengths. However, semiconductors need to be integrated with high-quality dielectrics—which are challenging to deposit. Here we show that single-crystal strontium titanate—a high-κ perovski...