Optimization of molybdenum electrode properties in ScAlN deposition process
The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film.
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2023
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| Online Access: | https://hdl.handle.net/10356/166171 |
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| Institution: | Nanyang Technological University |
| Language: | English |