Optimization of molybdenum electrode properties in ScAlN deposition process

The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film.

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Bibliographic Details
Main Author:	Pan, Ziran
Other Authors:	Tay Beng Kang
Format:	Thesis-Master by Coursework
Language:	English
Published:	Nanyang Technological University 2023
Subjects:	Engineering::Electrical and electronic engineering
Online Access:	https://hdl.handle.net/10356/166171
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-166171
record_format	dspace
spelling	sg-ntu-dr.10356-1661712023-04-16T05:19:47Z Optimization of molybdenum electrode properties in ScAlN deposition process Pan, Ziran Tay Beng Kang School of Electrical and Electronic Engineering EBKTAY@ntu.edu.sg Engineering::Electrical and electronic engineering The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film. Master of Science (Green Electronics) 2023-04-16T05:19:47Z 2023-04-16T05:19:47Z 2023 Thesis-Master by Coursework Pan, Z. (2023). Optimization of molybdenum electrode properties in ScAlN deposition process. Master's thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/166171 https://hdl.handle.net/10356/166171 en ISM-DISS-03709 application/pdf Nanyang Technological University
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	Engineering::Electrical and electronic engineering
spellingShingle	Engineering::Electrical and electronic engineering Pan, Ziran Optimization of molybdenum electrode properties in ScAlN deposition process
description	The project mainly concentrates on optimizing the Molybdenum thin film properties by high-power magnetron sputtering. Three paramters are mainly researched including power, Argon pressure and seed-layer thickness. A best method is found to achieve best properties of Mo thin film.
author2	Tay Beng Kang
author_facet	Tay Beng Kang Pan, Ziran
format	Thesis-Master by Coursework
author	Pan, Ziran
author_sort	Pan, Ziran
title	Optimization of molybdenum electrode properties in ScAlN deposition process
title_short	Optimization of molybdenum electrode properties in ScAlN deposition process
title_full	Optimization of molybdenum electrode properties in ScAlN deposition process
title_fullStr	Optimization of molybdenum electrode properties in ScAlN deposition process
title_full_unstemmed	Optimization of molybdenum electrode properties in ScAlN deposition process
title_sort	optimization of molybdenum electrode properties in scaln deposition process
publisher	Nanyang Technological University
publishDate	2023
url	https://hdl.handle.net/10356/166171
_version_	1764208117655011328

Optimization of molybdenum electrode properties in ScAlN deposition process

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