Ge-on-Si avalanche photodiodes with photon trapping nanostructures for sensing and optical quantum applications

• Main Authors: Wu, Shaoteng, Zhou, Hao, He, Li, Wang, Zhaozhen, Chen, Qimiao, Zhang, Lin, Tan, Chuan Seng
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2023
• 主題: Engineering::Electrical and electronic engineering; Germanium; Avalanche Photodiode; Silicon Photonics; Photon Trapping
• 在線閱讀: https://hdl.handle.net/10356/166601

High-sensitivity Ge/Si avalanche photodiodes (APDs) have recently gained attention for their application in sensing and optical communication due to their low cost and CMOS compatible process. However, compared to commercial III–V compound APDs, Ge/Si APDs usually suffer from the issue of relatively...