Automation of in-situ RHEED analysis by LabView

• 主要作者: Tan, San San.
• 其他作者: Zhu Weiguang
• 格式: Final Year Project
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/16797
• 機構: Nanyang Technological University

Reflection High Energy Electron Diffraction (RHEED) is a real-time technique for monitoring the surface structure during the growth of epitaxial thin films. For the typical RHEED, a beam of electrons at energy usually between 8 to 20KeV is incident onto the surface of the substrate at a glancing ang...