Automation of in-situ RHEED analysis by LabView

• Main Author: Tan, San San.
• Other Authors: Zhu Weiguang
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/16797
• Institution: Nanyang Technological University

Reflection High Energy Electron Diffraction (RHEED) is a real-time technique for monitoring the surface structure during the growth of epitaxial thin films. For the typical RHEED, a beam of electrons at energy usually between 8 to 20KeV is incident onto the surface of the substrate at a glancing ang...