Investigation of multilayer thin films using ellipsometry

• Main Author: He, Lining.
• Other Authors: Rusli
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/16800
• Institution: Nanyang Technological University

Spectroscopic Ellipsometry (SE) is a powerful and universal optical technique for the investigation of optical properties of semiconductor thin films. It is an extremely sensitive measurement tool for the characterization of single layer thin film and even multilayer structures. This project focus...