Characterization of wafers by V(Z) curve technique of scanning acoustic microscopy

The report presents the work performed on the evaluation of Young’s Modulus using the V(z) curve technique. The background of V(z) curve technique in determining the material properties non-destructively is introduced. In order for readers to understand the procedures undertaken for the project, a c...

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書目詳細資料
主要作者: Loh, Edwin Jin Wee.
其他作者: School of Mechanical and Aerospace Engineering
格式: Final Year Project
語言:English
出版: 2009
主題:
在線閱讀:http://hdl.handle.net/10356/17136
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機構: Nanyang Technological University
語言: English