Characterization of wafers by V(Z) curve technique of scanning acoustic microscopy

The report presents the work performed on the evaluation of Young’s Modulus using the V(z) curve technique. The background of V(z) curve technique in determining the material properties non-destructively is introduced. In order for readers to understand the procedures undertaken for the project, a c...

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Bibliographic Details
Main Author: Loh, Edwin Jin Wee.
Other Authors: School of Mechanical and Aerospace Engineering
Format: Final Year Project
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/17136
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Institution: Nanyang Technological University
Language: English

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