Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

• Main Authors: Liang, Xiaorui, Zhang, Lei, Tan, Qiulin, Cheng, Wenhua, Hu, Dan, Li, Shuang, Jing, Lin, Xiong, Jijun
• 其他作者: School of Materials Science and Engineering
• 格式: Article
• 語言: English
• 出版: 2023
• 主題: Engineering::Materials; Acoustic Waves; Etching
• 在線閱讀: https://hdl.handle.net/10356/171520
• 機構: Nanyang Technological University

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS2@G...