High quality GaN microplatelets grown by metal-organic vapor phase epitaxy on patterned silicon-on-insulator substrates: toward micro light-emitting diodes

• Main Authors: Baril, Kilian, Coulon, Pierre-Marie, Mrad, Mrad, Labchir, Nabil, Feuillet, Guy, Charles, Matthew, Gourgon, Cécile, Vennéguès, Philippe, Zúñiga-Pérez, Jesús, Alloing, Blandine
• Other Authors: School of Physical and Mathematical Sciences
• Format: Article
• Language: English
• Published: 2023
• Subjects: Science::Physics; Light-Emitting Diode; Microplatelet
• Online Access: https://hdl.handle.net/10356/171734
• Institution: Nanyang Technological University

In this paper, we report the use of three pendeo-epitaxy growth approaches as a way of reducing the threading dislocation density (TDD) of 20 × 20 μm2 GaN platelets to be used for the development of micro light-emitting diodes (μLEDs). The method relies on the coalescence of GaN crystallites grown o...