Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security

This perspective delves into the advanced technologies of highly sensitive and selective micro-electro-mechanical systems semiconductor hydrogen sensors. It explores the interplay between sensing material electrodynamics, separation material statistical mechanics, as well as chip thermodynamics, and...

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Main Authors:	Zhao, Yuxin, Zhao, Yanli
Other Authors:	School of Chemistry, Chemical Engineering and Biotechnology
Format:	Article
Language:	English
Published:	2024
Subjects:	Engineering Hydrogen energy security Gas sensors
Online Access:	https://hdl.handle.net/10356/180620
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-180620
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spelling	sg-ntu-dr.10356-1806202024-10-18T15:32:09Z Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security Zhao, Yuxin Zhao, Yanli School of Chemistry, Chemical Engineering and Biotechnology Engineering Hydrogen energy security Gas sensors This perspective delves into the advanced technologies of highly sensitive and selective micro-electro-mechanical systems semiconductor hydrogen sensors. It explores the interplay between sensing material electrodynamics, separation material statistical mechanics, as well as chip thermodynamics, and systematically charts the evolution of multilayered, innovative integration techniques among sensing materials, separation membranes, and low-power chips, proposing viable technological pathways. Agency for Science, Technology and Research (ASTAR) Published version The authors acknowledge funding from the National Natural Science Foundation of China (No. 62074123), Shaanxi Province Key Research and Development Plan (No. 2024GX‐ZDCYL‐01‐06), China National Petroleum Corporation (CNPC) Basic Research and Strategic Reserve Technology Research Fund Project (No.2023DQ03‐26), and the Singapore Agency for Science, Technology and Research (ASTAR) under the Manufacturing, Trade and Connectivity Individual Research Grant (No. M21K2c0105). 2024-10-15T05:26:19Z 2024-10-15T05:26:19Z 2024 Journal Article Zhao, Y. & Zhao, Y. (2024). Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security. SmartMat, e1303-. https://dx.doi.org/10.1002/smm2.1303 2688-819X https://hdl.handle.net/10356/180620 10.1002/smm2.1303 2-s2.0-85198748073 e1303 en M21K2c0105 SmartMat © 2024 The Author(s). SmartMat published by Tianjin University and John Wiley & Sons Australia, Ltd. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited. application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	Engineering Hydrogen energy security Gas sensors
spellingShingle	Engineering Hydrogen energy security Gas sensors Zhao, Yuxin Zhao, Yanli Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
description	This perspective delves into the advanced technologies of highly sensitive and selective micro-electro-mechanical systems semiconductor hydrogen sensors. It explores the interplay between sensing material electrodynamics, separation material statistical mechanics, as well as chip thermodynamics, and systematically charts the evolution of multilayered, innovative integration techniques among sensing materials, separation membranes, and low-power chips, proposing viable technological pathways.
author2	School of Chemistry, Chemical Engineering and Biotechnology
author_facet	School of Chemistry, Chemical Engineering and Biotechnology Zhao, Yuxin Zhao, Yanli
format	Article
author	Zhao, Yuxin Zhao, Yanli
author_sort	Zhao, Yuxin
title	Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
title_short	Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
title_full	Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
title_fullStr	Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
title_full_unstemmed	Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
title_sort	toward highly sensitive, selective, and stable palladium-based mems gas sensors for hydrogen energy security
publishDate	2024
url	https://hdl.handle.net/10356/180620
_version_	1814777713158782976

Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security

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