Toward highly sensitive, selective, and stable palladium-based MEMS gas sensors for hydrogen energy security
This perspective delves into the advanced technologies of highly sensitive and selective micro-electro-mechanical systems semiconductor hydrogen sensors. It explores the interplay between sensing material electrodynamics, separation material statistical mechanics, as well as chip thermodynamics, and...
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/180620 |
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| Institution: | Nanyang Technological University |
| Language: | English |